Abstract
An ultrahigh vacuum direct-drive, cryogenic sample manipulator is described. It is fully bakeable in UHV, uses no lubricants, and does not require differentially pumped seals. It provides independent polar and azimuthal rotation of a sample, three degrees of translational freedom, electron-beam heating, as well as cooling to 100 K using liquid nitrogen.
Original language | English (US) |
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Pages (from-to) | 2867-2870 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 11 |
Issue number | 5 |
DOIs | |
State | Published - Sep 1993 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films