Abstract
An ultrahigh vacuum direct-drive, cryogenic sample manipulator is described. It is fully bakeable in UHV, uses no lubricants, and does not require differentially pumped seals. It provides independent polar and azimuthal rotation of a sample, three degrees of translational freedom, electron-beam heating, as well as cooling to 100 K using liquid nitrogen.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2867-2870 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 11 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 1993 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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