Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing

Chung Seok Seo; Sung Hwan Min; Chris Ward; Peter Wallace; George White; Madhavan Swaminathan

doi:10.1109/APMC.2007.4554561

Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing

Chung Seok Seo, Sung Hwan Min, Chris Ward, Peter Wallace, George White, Madhavan Swaminathan

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper, we present Process Control Monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

Original language	English (US)
Title of host publication	2007 Asia-Pacific Microwave Conference, APMC
DOIs	https://doi.org/10.1109/APMC.2007.4554561
State	Published - 2007
Event	Asia-Pacific Microwave Conference, APMC 2007 - Bangkok, Thailand Duration: Dec 11 2007 → Dec 14 2007

Publication series

Name	Asia-Pacific Microwave Conference Proceedings, APMC

Conference

Conference	Asia-Pacific Microwave Conference, APMC 2007
Country/Territory	Thailand
City	Bangkok
Period	12/11/07 → 12/14/07

All Science Journal Classification (ASJC) codes

General Engineering

Access to Document

10.1109/APMC.2007.4554561

Cite this

Seo, C. S., Min, S. H., Ward, C., Wallace, P., White, G., & Swaminathan, M. (2007). Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing. In 2007 Asia-Pacific Microwave Conference, APMC Article 4554561 (Asia-Pacific Microwave Conference Proceedings, APMC). https://doi.org/10.1109/APMC.2007.4554561

@inproceedings{212673f843cd400dabb48e6e9ad4bd90,

title = "Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing",

abstract = "In this paper, we present Process Control Monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.",

author = "Seo, {Chung Seok} and Min, {Sung Hwan} and Chris Ward and Peter Wallace and George White and Madhavan Swaminathan",

year = "2007",

doi = "10.1109/APMC.2007.4554561",

language = "English (US)",

isbn = "1424407494",

series = "Asia-Pacific Microwave Conference Proceedings, APMC",

booktitle = "2007 Asia-Pacific Microwave Conference, APMC",

note = "Asia-Pacific Microwave Conference, APMC 2007 ; Conference date: 11-12-2007 Through 14-12-2007",

}

Seo, CS, Min, SH, Ward, C, Wallace, P, White, G & Swaminathan, M 2007, Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing. in 2007 Asia-Pacific Microwave Conference, APMC., 4554561, Asia-Pacific Microwave Conference Proceedings, APMC, Asia-Pacific Microwave Conference, APMC 2007, Bangkok, Thailand, 12/11/07. https://doi.org/10.1109/APMC.2007.4554561

Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing. / Seo, Chung Seok; Min, Sung Hwan; Ward, Chris et al.
2007 Asia-Pacific Microwave Conference, APMC. 2007. 4554561 (Asia-Pacific Microwave Conference Proceedings, APMC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing

AU - Seo, Chung Seok

AU - Min, Sung Hwan

AU - Ward, Chris

AU - Wallace, Peter

AU - White, George

AU - Swaminathan, Madhavan

PY - 2007

Y1 - 2007

N2 - In this paper, we present Process Control Monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

AB - In this paper, we present Process Control Monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

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U2 - 10.1109/APMC.2007.4554561

DO - 10.1109/APMC.2007.4554561

M3 - Conference contribution

AN - SCOPUS:51849121657

SN - 1424407494

SN - 9781424407491

T3 - Asia-Pacific Microwave Conference Proceedings, APMC

BT - 2007 Asia-Pacific Microwave Conference, APMC

T2 - Asia-Pacific Microwave Conference, APMC 2007

Y2 - 11 December 2007 through 14 December 2007

ER -

Design of integrated RF modules with process control monitors on liquid crystalline polymer substrates for large volume manufacturing

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