Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO

James L. Delattre; Todd L. Friedman; Angelica M. Stacy

Destructive abatement of CF₄ and C₂F₆ via a plasma induced reaction with CaO

James L. Delattre, Todd L. Friedman, Angelica M. Stacy

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Abstract

The plasma induced reactions of CF₄ and C₂F₆ with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. The reaction of CaO with CF₄ (10 sccm flow), activated by an inductively coupled plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF₄. Under the same conditions >80% of C₂F₆ was destroyed. For both reactions, the major solid product is polycrystalline CaF₂, an environmentally benign mineral with commercial value. The major gaseous products are CO and CO₂. These reaction products are attractive alternatives to fluorine-containing byproducts such as F_2(g), COF_2(g), and HF_(aq) generated by traditional perfluorocarbon abatement techniques.

Original language	English (US)
Pages (from-to)	2664-2666
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	17
Issue number	6
State	Published - 1999

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO",

abstract = "The plasma induced reactions of CF4 and C2F6 with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. The reaction of CaO with CF4 (10 sccm flow), activated by an inductively coupled plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF4. Under the same conditions >80% of C2F6 was destroyed. For both reactions, the major solid product is polycrystalline CaF2, an environmentally benign mineral with commercial value. The major gaseous products are CO and CO2. These reaction products are attractive alternatives to fluorine-containing byproducts such as F2(g), COF2(g), and HF(aq) generated by traditional perfluorocarbon abatement techniques.",

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T1 - Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO

AU - Delattre, James L.

AU - Friedman, Todd L.

AU - Stacy, Angelica M.

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Y1 - 1999

N2 - The plasma induced reactions of CF4 and C2F6 with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. The reaction of CaO with CF4 (10 sccm flow), activated by an inductively coupled plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF4. Under the same conditions >80% of C2F6 was destroyed. For both reactions, the major solid product is polycrystalline CaF2, an environmentally benign mineral with commercial value. The major gaseous products are CO and CO2. These reaction products are attractive alternatives to fluorine-containing byproducts such as F2(g), COF2(g), and HF(aq) generated by traditional perfluorocarbon abatement techniques.

AB - The plasma induced reactions of CF4 and C2F6 with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. The reaction of CaO with CF4 (10 sccm flow), activated by an inductively coupled plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF4. Under the same conditions >80% of C2F6 was destroyed. For both reactions, the major solid product is polycrystalline CaF2, an environmentally benign mineral with commercial value. The major gaseous products are CO and CO2. These reaction products are attractive alternatives to fluorine-containing byproducts such as F2(g), COF2(g), and HF(aq) generated by traditional perfluorocarbon abatement techniques.

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Destructive abatement of CF₄ and C₂F₆ via a plasma induced reaction with CaO

Abstract

All Science Journal Classification (ASJC) codes

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