Detection of sputtered neutrals by multi-photon resonance ionization

F. M. Kimock; J. P. Baxter; N. Winograd

doi:10.1016/0167-5087(83)90992-4

Detection of sputtered neutrals by multi-photon resonance ionization

F. M. Kimock, J. P. Baxter, N. Winograd

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23 Scopus citations

Abstract

The use of multi-photon resonance ionization (MPRI) has recently been demonstrated to be a highly efficient and selective tool for the ionization of neutral species ejected from ion bombarded surfaces. The experimental aspects of this new technique are discussed in detail. These include detector configurations, pulse timing considerations and the means of selecting the appropriate ionization scheme. Using indium as a model system, the relative yields of neutral In²P_{1 2}, In²P_{3 2} and In² have been determined on the clean metal surface and as a function of oxygen exposure. When comparing the results to static SIMS measurements the behavior of the In₂/In ratio is found to be similar to that of the In₂⁺/In⁺ ratio as a function of oxygen exposure. The analytical aspects of the technique are also discussed with regard to the development of an improved approach for the trace analysis of solids which exhibits less serious matrix effects than those found by SIMS.

Original language	English (US)
Pages (from-to)	287-292
Number of pages	6
Journal	Nuclear Instruments and Methods In Physics Research
Volume	218
Issue number	1-3
DOIs	https://doi.org/10.1016/0167-5087(83)90992-4
State	Published - Dec 15 1983

All Science Journal Classification (ASJC) codes

General Engineering

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10.1016/0167-5087(83)90992-4

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@article{8d2f7a88e560436bbf1fc7a93d01055a,

title = "Detection of sputtered neutrals by multi-photon resonance ionization",

abstract = "The use of multi-photon resonance ionization (MPRI) has recently been demonstrated to be a highly efficient and selective tool for the ionization of neutral species ejected from ion bombarded surfaces. The experimental aspects of this new technique are discussed in detail. These include detector configurations, pulse timing considerations and the means of selecting the appropriate ionization scheme. Using indium as a model system, the relative yields of neutral In 2P 1 2, In 2P 3 2 and In2 have been determined on the clean metal surface and as a function of oxygen exposure. When comparing the results to static SIMS measurements the behavior of the In2/In ratio is found to be similar to that of the In2+/In+ ratio as a function of oxygen exposure. The analytical aspects of the technique are also discussed with regard to the development of an improved approach for the trace analysis of solids which exhibits less serious matrix effects than those found by SIMS.",

author = "Kimock, {F. M.} and Baxter, {J. P.} and N. Winograd",

note = "Funding Information: The financial support of the National Science Foundation, the Office of Naval Research, the Air Force Office of Scientific Research and the Petroleum Research Foundation is gratefully acknowledged. The authors also wish to thank Dr Paul Kobrin for his encouragement during the later stages of this work.",

year = "1983",

month = dec,

day = "15",

doi = "10.1016/0167-5087(83)90992-4",

language = "English (US)",

volume = "218",

pages = "287--292",

journal = "Nuclear Instruments and Methods In Physics Research",

issn = "0167-5087",

publisher = "North-Holland Publ Co",

number = "1-3",

}

TY - JOUR

T1 - Detection of sputtered neutrals by multi-photon resonance ionization

AU - Kimock, F. M.

AU - Baxter, J. P.

AU - Winograd, N.

N1 - Funding Information: The financial support of the National Science Foundation, the Office of Naval Research, the Air Force Office of Scientific Research and the Petroleum Research Foundation is gratefully acknowledged. The authors also wish to thank Dr Paul Kobrin for his encouragement during the later stages of this work.

PY - 1983/12/15

Y1 - 1983/12/15

N2 - The use of multi-photon resonance ionization (MPRI) has recently been demonstrated to be a highly efficient and selective tool for the ionization of neutral species ejected from ion bombarded surfaces. The experimental aspects of this new technique are discussed in detail. These include detector configurations, pulse timing considerations and the means of selecting the appropriate ionization scheme. Using indium as a model system, the relative yields of neutral In 2P 1 2, In 2P 3 2 and In2 have been determined on the clean metal surface and as a function of oxygen exposure. When comparing the results to static SIMS measurements the behavior of the In2/In ratio is found to be similar to that of the In2+/In+ ratio as a function of oxygen exposure. The analytical aspects of the technique are also discussed with regard to the development of an improved approach for the trace analysis of solids which exhibits less serious matrix effects than those found by SIMS.

AB - The use of multi-photon resonance ionization (MPRI) has recently been demonstrated to be a highly efficient and selective tool for the ionization of neutral species ejected from ion bombarded surfaces. The experimental aspects of this new technique are discussed in detail. These include detector configurations, pulse timing considerations and the means of selecting the appropriate ionization scheme. Using indium as a model system, the relative yields of neutral In 2P 1 2, In 2P 3 2 and In2 have been determined on the clean metal surface and as a function of oxygen exposure. When comparing the results to static SIMS measurements the behavior of the In2/In ratio is found to be similar to that of the In2+/In+ ratio as a function of oxygen exposure. The analytical aspects of the technique are also discussed with regard to the development of an improved approach for the trace analysis of solids which exhibits less serious matrix effects than those found by SIMS.

UR - http://www.scopus.com/inward/record.url?scp=0041927950&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0041927950&partnerID=8YFLogxK

U2 - 10.1016/0167-5087(83)90992-4

DO - 10.1016/0167-5087(83)90992-4

M3 - Article

AN - SCOPUS:0041927950

SN - 0167-5087

VL - 218

SP - 287

EP - 292

JO - Nuclear Instruments and Methods In Physics Research

JF - Nuclear Instruments and Methods In Physics Research

IS - 1-3

ER -

Detection of sputtered neutrals by multi-photon resonance ionization

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