Detection of sputtered neutrals by multi-photon resonance ionization

F. M. Kimock, J. P. Baxter, N. Winograd

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23 Scopus citations


The use of multi-photon resonance ionization (MPRI) has recently been demonstrated to be a highly efficient and selective tool for the ionization of neutral species ejected from ion bombarded surfaces. The experimental aspects of this new technique are discussed in detail. These include detector configurations, pulse timing considerations and the means of selecting the appropriate ionization scheme. Using indium as a model system, the relative yields of neutral In 2P 1 2, In 2P 3 2 and In2 have been determined on the clean metal surface and as a function of oxygen exposure. When comparing the results to static SIMS measurements the behavior of the In2/In ratio is found to be similar to that of the In2+/In+ ratio as a function of oxygen exposure. The analytical aspects of the technique are also discussed with regard to the development of an improved approach for the trace analysis of solids which exhibits less serious matrix effects than those found by SIMS.

Original languageEnglish (US)
Pages (from-to)287-292
Number of pages6
JournalNuclear Instruments and Methods In Physics Research
Issue number1-3
StatePublished - Dec 15 1983

All Science Journal Classification (ASJC) codes

  • General Engineering


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