Determination of subsurface damage in single crystalline optical materials

Joseph A. Randi, J. C. Lambropoulos, S. D. Jacobs, Shai N. Shafrir

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Peak-to-valley surface microroughness measurement data acquired from a white light interferometer are compared with data from the actual depth of subsurface damage (SSD) acquired destructively, in single crystalline optical materials (Si, CaF, MgF2, LiNbO3, Al2O3) after deterministic microgrinding (DMG). The results demonstrate that SSD is always less than 1.4 times the peak-to-valley surface microroughness for these crystals regardless of crystallographic orientation. These results enable a maximum depth of SSD to be predicted non-invasively for these single crystal materials. The Center for Optics Manufacturing also has an extensive database comparing surface microroughness to SSD in optical glasses. This data will be presented, demonstrating the upper bound for SSD depth in optical glasses based on the surface microroughness. Interferometer settings and destructive techniques for physically determining SSD will be presented.

Original languageEnglish (US)
Title of host publicationOptifab 2003
Subtitle of host publicationTechnical Digest
EditorsHarvey M. Pollicove, Walter C. Czajkowski, Toshihide Dohi, Hans Lauth
Number of pages3
ISBN (Electronic)9780819451040
StatePublished - May 19 2003
EventOptifab 2003: Technical Digest - Rochester, United States
Duration: May 19 2003May 22 2003

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherOptifab 2003: Technical Digest
Country/TerritoryUnited States

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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