Determination of subsurface damage in single crystalline optical materials

Joseph A. Randi; J. C. Lambropoulos; S. D. Jacobs; Shai N. Shafrir

doi:10.1117/12.2284018

Determination of subsurface damage in single crystalline optical materials

Joseph A. Randi
, J. C. Lambropoulos
, S. D. Jacobs
, Shai N. Shafrir

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Peak-to-valley surface microroughness measurement data acquired from a white light interferometer are compared with data from the actual depth of subsurface damage (SSD) acquired destructively, in single crystalline optical materials (Si, CaF, MgF₂, LiNbO₃, Al₂O₃) after deterministic microgrinding (DMG). The results demonstrate that SSD is always less than 1.4 times the peak-to-valley surface microroughness for these crystals regardless of crystallographic orientation. These results enable a maximum depth of SSD to be predicted non-invasively for these single crystal materials. The Center for Optics Manufacturing also has an extensive database comparing surface microroughness to SSD in optical glasses. This data will be presented, demonstrating the upper bound for SSD depth in optical glasses based on the surface microroughness. Interferometer settings and destructive techniques for physically determining SSD will be presented.

Original language	English (US)
Title of host publication	Optifab 2003
Subtitle of host publication	Technical Digest
Editors	Harvey M. Pollicove, Walter C. Czajkowski, Toshihide Dohi, Hans Lauth
Publisher	SPIE
Pages	84-86
Number of pages	3
ISBN (Electronic)	9780819451040
DOIs	https://doi.org/10.1117/12.2284018
State	Published - May 19 2003
Event	Optifab 2003: Technical Digest - Rochester, United States Duration: May 19 2003 → May 22 2003

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10314
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Optifab 2003: Technical Digest
Country/Territory	United States
City	Rochester
Period	5/19/03 → 5/22/03

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2284018

Cite this

Randi, J. A., Lambropoulos, J. C., Jacobs, S. D., & Shafrir, S. N. (2003). Determination of subsurface damage in single crystalline optical materials. In H. M. Pollicove, W. C. Czajkowski, T. Dohi, & H. Lauth (Eds.), Optifab 2003: Technical Digest (pp. 84-86). Article 103140T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10314). SPIE. https://doi.org/10.1117/12.2284018

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title = "Determination of subsurface damage in single crystalline optical materials",

abstract = "Peak-to-valley surface microroughness measurement data acquired from a white light interferometer are compared with data from the actual depth of subsurface damage (SSD) acquired destructively, in single crystalline optical materials (Si, CaF, MgF2, LiNbO3, Al2O3) after deterministic microgrinding (DMG). The results demonstrate that SSD is always less than 1.4 times the peak-to-valley surface microroughness for these crystals regardless of crystallographic orientation. These results enable a maximum depth of SSD to be predicted non-invasively for these single crystal materials. The Center for Optics Manufacturing also has an extensive database comparing surface microroughness to SSD in optical glasses. This data will be presented, demonstrating the upper bound for SSD depth in optical glasses based on the surface microroughness. Interferometer settings and destructive techniques for physically determining SSD will be presented.",

author = "Randi, \{Joseph A.\} and Lambropoulos, \{J. C.\} and Jacobs, \{S. D.\} and Shafrir, \{Shai N.\}",

note = "Publisher Copyright: Copyright {\textcopyright} 2017 SPIE.; Optifab 2003: Technical Digest ; Conference date: 19-05-2003 Through 22-05-2003",

year = "2003",

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doi = "10.1117/12.2284018",

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}

Randi, JA, Lambropoulos, JC, Jacobs, SD & Shafrir, SN 2003, Determination of subsurface damage in single crystalline optical materials. in HM Pollicove, WC Czajkowski, T Dohi & H Lauth (eds), Optifab 2003: Technical Digest., 103140T, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10314, SPIE, pp. 84-86, Optifab 2003: Technical Digest, Rochester, United States, 5/19/03. https://doi.org/10.1117/12.2284018

Determination of subsurface damage in single crystalline optical materials. / Randi, Joseph A.; Lambropoulos, J. C.; Jacobs, S. D. et al.
Optifab 2003: Technical Digest. ed. / Harvey M. Pollicove; Walter C. Czajkowski; Toshihide Dohi; Hans Lauth. SPIE, 2003. p. 84-86 103140T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10314).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Randi, Joseph A.

AU - Lambropoulos, J. C.

AU - Jacobs, S. D.

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PY - 2003/5/19

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N2 - Peak-to-valley surface microroughness measurement data acquired from a white light interferometer are compared with data from the actual depth of subsurface damage (SSD) acquired destructively, in single crystalline optical materials (Si, CaF, MgF2, LiNbO3, Al2O3) after deterministic microgrinding (DMG). The results demonstrate that SSD is always less than 1.4 times the peak-to-valley surface microroughness for these crystals regardless of crystallographic orientation. These results enable a maximum depth of SSD to be predicted non-invasively for these single crystal materials. The Center for Optics Manufacturing also has an extensive database comparing surface microroughness to SSD in optical glasses. This data will be presented, demonstrating the upper bound for SSD depth in optical glasses based on the surface microroughness. Interferometer settings and destructive techniques for physically determining SSD will be presented.

AB - Peak-to-valley surface microroughness measurement data acquired from a white light interferometer are compared with data from the actual depth of subsurface damage (SSD) acquired destructively, in single crystalline optical materials (Si, CaF, MgF2, LiNbO3, Al2O3) after deterministic microgrinding (DMG). The results demonstrate that SSD is always less than 1.4 times the peak-to-valley surface microroughness for these crystals regardless of crystallographic orientation. These results enable a maximum depth of SSD to be predicted non-invasively for these single crystal materials. The Center for Optics Manufacturing also has an extensive database comparing surface microroughness to SSD in optical glasses. This data will be presented, demonstrating the upper bound for SSD depth in optical glasses based on the surface microroughness. Interferometer settings and destructive techniques for physically determining SSD will be presented.

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ER -

Determination of subsurface damage in single crystalline optical materials

Abstract

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All Science Journal Classification (ASJC) codes

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