Development of novel flexible black silicon

Hao Mei, Chao Wang, Jimmy Yao, Yun Ching Chang, Jiping Cheng, Yong Zhu, Shizhuo Yin, Claire Luo

Research output: Contribution to journalArticlepeer-review

34 Scopus citations


We report a new type of black silicon: flexible black silicon. A silicon-on-insulator (SOI) wafer is irradiated by automatically scanning a femtosecond laser and then split by etching out the SOI silica middle layer. Large-area, uniform micro spikes on the surface of a very thin flexible silicon layer are obtained. The black silicon shows good flexibility and optical properties. The absorption spectrum of the flexible black silicon is as high as 97% in the visible and insensitive to the change of the incident angle of the light, which makes it a potential good candidate as an absorber for the solar-thermo generator.

Original languageEnglish (US)
Pages (from-to)1072-1075
Number of pages4
JournalOptics Communications
Issue number4
StatePublished - Feb 15 2011

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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