Dielectric and piezoelectric properties of sol-gel derived lead magnesium niobium titanate films with different textures

Jeong Hwan Park; Fei Xu; Susan Trolier-McKinstry

doi:10.1063/1.1324685

Dielectric and piezoelectric properties of sol-gel derived lead magnesium niobium titanate films with different textures

Jeong Hwan Park, Fei Xu, Susan Trolier-McKinstry

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82 Scopus citations

Abstract

The piezoelectric and dielectric constants for Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃(PMN-PT, 70/30) films with different orientations were measured. PMN-PT films were deposited on Pt(111)-passivated silicon substrates using a modified sol-gel process. The room temperature dielectric constants K for the (100)-oriented films were 2500-2600, while K for (111)-oriented films were 1900-2000. In both cases tan δ was less than 0.03. The dependence of the piezoelectric coefficient d₃₁of the PMN-PT films on the poling fields was investigated. The d₃₁coefficients of (100)-oriented PMN-PT films were found to range from -28 to -69 pC/N with poling field. The (100)-oriented PMN-PT films showed larger piezoelectric coefficient than (111)-oriented films. The d₃₃coefficients of the 1.5 μm thick (100) oriented PMN-PT films were ∼170-183 pC/N. The aging rate of -d₃₁was ∼4%-10%/decade.

Original language	English (US)
Pages (from-to)	568-574
Number of pages	7
Journal	Journal of Applied Physics
Volume	89
Issue number	1
DOIs	https://doi.org/10.1063/1.1324685
State	Published - Jan 1 2001

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Physics and Astronomy(all)

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@article{e6830e47843a478fa495174b3d42e82f,

title = "Dielectric and piezoelectric properties of sol-gel derived lead magnesium niobium titanate films with different textures",

abstract = "The piezoelectric and dielectric constants for Pb(Mg1/3Nb2/3)O3-PbTiO3(PMN-PT, 70/30) films with different orientations were measured. PMN-PT films were deposited on Pt(111)-passivated silicon substrates using a modified sol-gel process. The room temperature dielectric constants K for the (100)-oriented films were 2500-2600, while K for (111)-oriented films were 1900-2000. In both cases tan δ was less than 0.03. The dependence of the piezoelectric coefficient d31of the PMN-PT films on the poling fields was investigated. The d31coefficients of (100)-oriented PMN-PT films were found to range from -28 to -69 pC/N with poling field. The (100)-oriented PMN-PT films showed larger piezoelectric coefficient than (111)-oriented films. The d33coefficients of the 1.5 μm thick (100) oriented PMN-PT films were ∼170-183 pC/N. The aging rate of -d31was ∼4%-10%/decade.",

author = "Park, {Jeong Hwan} and Fei Xu and Susan Trolier-McKinstry",

year = "2001",

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doi = "10.1063/1.1324685",

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T1 - Dielectric and piezoelectric properties of sol-gel derived lead magnesium niobium titanate films with different textures

AU - Park, Jeong Hwan

AU - Xu, Fei

AU - Trolier-McKinstry, Susan

PY - 2001/1/1

Y1 - 2001/1/1

N2 - The piezoelectric and dielectric constants for Pb(Mg1/3Nb2/3)O3-PbTiO3(PMN-PT, 70/30) films with different orientations were measured. PMN-PT films were deposited on Pt(111)-passivated silicon substrates using a modified sol-gel process. The room temperature dielectric constants K for the (100)-oriented films were 2500-2600, while K for (111)-oriented films were 1900-2000. In both cases tan δ was less than 0.03. The dependence of the piezoelectric coefficient d31of the PMN-PT films on the poling fields was investigated. The d31coefficients of (100)-oriented PMN-PT films were found to range from -28 to -69 pC/N with poling field. The (100)-oriented PMN-PT films showed larger piezoelectric coefficient than (111)-oriented films. The d33coefficients of the 1.5 μm thick (100) oriented PMN-PT films were ∼170-183 pC/N. The aging rate of -d31was ∼4%-10%/decade.

AB - The piezoelectric and dielectric constants for Pb(Mg1/3Nb2/3)O3-PbTiO3(PMN-PT, 70/30) films with different orientations were measured. PMN-PT films were deposited on Pt(111)-passivated silicon substrates using a modified sol-gel process. The room temperature dielectric constants K for the (100)-oriented films were 2500-2600, while K for (111)-oriented films were 1900-2000. In both cases tan δ was less than 0.03. The dependence of the piezoelectric coefficient d31of the PMN-PT films on the poling fields was investigated. The d31coefficients of (100)-oriented PMN-PT films were found to range from -28 to -69 pC/N with poling field. The (100)-oriented PMN-PT films showed larger piezoelectric coefficient than (111)-oriented films. The d33coefficients of the 1.5 μm thick (100) oriented PMN-PT films were ∼170-183 pC/N. The aging rate of -d31was ∼4%-10%/decade.

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Dielectric and piezoelectric properties of sol-gel derived lead magnesium niobium titanate films with different textures

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