Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

Kwang Su Lee; Jin Young Kim; Jeffrey Fortin; Zhiping Jiang; Ming Li; Toh Ming Lu; X. C. Zhang

doi:10.1007/978-3-642-56546-5_69

Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

Kwang Su Lee, Jin Young Kim, Jeffrey Fortin, Zhiping Jiang, Ming Li, Toh Ming Lu, X. C. Zhang

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3 Scopus citations

Abstract

Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.

Original language	English (US)
Pages (from-to)	232-234
Number of pages	3
Journal	Springer Series in Chemical Physics
Volume	66
DOIs	https://doi.org/10.1007/978-3-642-56546-5_69
State	Published - 2001

All Science Journal Classification (ASJC) codes

Physical and Theoretical Chemistry

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10.1007/978-3-642-56546-5_69

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@article{5083219117214831a86ee723d7764b1e,

title = "Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy",

abstract = "Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.",

author = "Lee, {Kwang Su} and Kim, {Jin Young} and Jeffrey Fortin and Zhiping Jiang and Ming Li and Lu, {Toh Ming} and Zhang, {X. C.}",

year = "2001",

doi = "10.1007/978-3-642-56546-5_69",

language = "English (US)",

volume = "66",

pages = "232--234",

journal = "Springer Series in Chemical Physics",

issn = "0172-6218",

publisher = "Springer New York",

}

TY - JOUR

T1 - Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

AU - Lee, Kwang Su

AU - Kim, Jin Young

AU - Fortin, Jeffrey

AU - Jiang, Zhiping

AU - Li, Ming

AU - Lu, Toh Ming

AU - Zhang, X. C.

PY - 2001

Y1 - 2001

N2 - Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.

AB - Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.

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UR - http://www.scopus.com/inward/citedby.url?scp=0035778971&partnerID=8YFLogxK

U2 - 10.1007/978-3-642-56546-5_69

DO - 10.1007/978-3-642-56546-5_69

M3 - Article

AN - SCOPUS:0035778971

SN - 0172-6218

VL - 66

SP - 232

EP - 234

JO - Springer Series in Chemical Physics

JF - Springer Series in Chemical Physics

ER -

Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

Abstract

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