Abstract
We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on "striped" high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of "mixed-mode" integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry.
Original language | English (US) |
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Pages (from-to) | 31-42 |
Number of pages | 12 |
Journal | Microelectronic Engineering |
Volume | 75 |
Issue number | 1 |
DOIs | |
State | Published - Jul 2004 |
Event | Proceedings of the Symposium on Characterization - Phoenix, AZ, United States Duration: Jun 17 2003 → Jun 20 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering