Dielectrophoretic assembly of lead zirconate titanate microtubes

V. Koval; S. S.N. Bharadwaja; M. Li; T. S. Mayer; S. Trolier-Mckinstry

doi:10.1016/j.ssc.2011.09.004

Dielectrophoretic assembly of lead zirconate titanate microtubes

V. Koval, S. S.N. Bharadwaja, M. Li, T. S. Mayer, S. Trolier-Mckinstry

Research output: Contribution to journal › Article › peer-review

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Abstract

Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 V_rms and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks

Original language	English (US)
Pages (from-to)	1990-1993
Number of pages	4
Journal	Solid State Communications
Volume	151
Issue number	24
DOIs	https://doi.org/10.1016/j.ssc.2011.09.004
State	Published - Dec 2011

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Materials Chemistry

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10.1016/j.ssc.2011.09.004

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title = "Dielectrophoretic assembly of lead zirconate titanate microtubes",

abstract = "Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 Vrms and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks",

author = "V. Koval and Bharadwaja, {S. S.N.} and M. Li and Mayer, {T. S.} and S. Trolier-Mckinstry",

note = "Funding Information: A research stay at the Pennsylvania State University for Vladimir Koval was financially supported by the US Department of State through a Fulbright Scholarship Grant No. G-1-00005 . The financial support of the Grant Agency of the Slovak Academy of Sciences through Grant No. 2/0053/11 , COST MP0904 Action and Operational Program “Research and Development” through the European Regional Development Fund for the project “Centre of Excellence of Advanced Materials with Nano- and Submicron- Structure” are also gratefully acknowledged.",

year = "2011",

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AU - Koval, V.

AU - Bharadwaja, S. S.N.

AU - Li, M.

AU - Mayer, T. S.

AU - Trolier-Mckinstry, S.

N1 - Funding Information: A research stay at the Pennsylvania State University for Vladimir Koval was financially supported by the US Department of State through a Fulbright Scholarship Grant No. G-1-00005 . The financial support of the Grant Agency of the Slovak Academy of Sciences through Grant No. 2/0053/11 , COST MP0904 Action and Operational Program “Research and Development” through the European Regional Development Fund for the project “Centre of Excellence of Advanced Materials with Nano- and Submicron- Structure” are also gratefully acknowledged.

PY - 2011/12

Y1 - 2011/12

N2 - Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 Vrms and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks

AB - Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 Vrms and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks

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Dielectrophoretic assembly of lead zirconate titanate microtubes

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