Direct measurement of the in situ developed latent image: The residual swelling fraction

Vivek M. Prabhu; Bryan D. Vogt; Shuhui Kang; Ashwin Rao; Eric K. Lin; Sushil K. Satija; Karen Turnquest

doi:10.1117/12.712311

Direct measurement of the in situ developed latent image: The residual swelling fraction

Vivek M. Prabhu, Bryan D. Vogt, Shuhui Kang, Ashwin Rao, Eric K. Lin, Sushil K. Satija, Karen Turnquest

Chemical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

The spatial distribution of polymer photoresist and deuterium labeled developer highlights a fraction of material at a model line edge that swells, but does not dissolve. This residual swelling fraction remains swollen during both the in situ development and rinse steps uncovering that the final lithographic feature is resolved by a collapse mechanism during the drying step. We demonstrate that contrast variant neutron reflectivity provides a general method to probe the nanometer resolved in situ development and rinse process step.

Original language	English (US)
Title of host publication	Advances in Resist Materials and Processing Technology XXIV
Edition	PART 1
DOIs	https://doi.org/10.1117/12.712311
State	Published - 2007
Event	Advances in Resist Materials and Processing Technology XXIV - San Jose, CA, United States Duration: Feb 26 2007 → Feb 28 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Number	PART 1
Volume	6519
ISSN (Print)	0277-786X

Conference

Conference	Advances in Resist Materials and Processing Technology XXIV
Country/Territory	United States
City	San Jose, CA
Period	2/26/07 → 2/28/07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.712311

Cite this

Prabhu, V. M., Vogt, B. D., Kang, S., Rao, A., Lin, E. K., Satija, S. K., & Turnquest, K. (2007). Direct measurement of the in situ developed latent image: The residual swelling fraction. In Advances in Resist Materials and Processing Technology XXIV (PART 1 ed.). Article 651910 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6519, No. PART 1). https://doi.org/10.1117/12.712311

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title = "Direct measurement of the in situ developed latent image: The residual swelling fraction",

abstract = "The spatial distribution of polymer photoresist and deuterium labeled developer highlights a fraction of material at a model line edge that swells, but does not dissolve. This residual swelling fraction remains swollen during both the in situ development and rinse steps uncovering that the final lithographic feature is resolved by a collapse mechanism during the drying step. We demonstrate that contrast variant neutron reflectivity provides a general method to probe the nanometer resolved in situ development and rinse process step.",

author = "Prabhu, {Vivek M.} and Vogt, {Bryan D.} and Shuhui Kang and Ashwin Rao and Lin, {Eric K.} and Satija, {Sushil K.} and Karen Turnquest",

year = "2007",

doi = "10.1117/12.712311",

language = "English (US)",

isbn = "0819466387",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

number = "PART 1",

booktitle = "Advances in Resist Materials and Processing Technology XXIV",

edition = "PART 1",

note = "Advances in Resist Materials and Processing Technology XXIV ; Conference date: 26-02-2007 Through 28-02-2007",

}

Prabhu, VM, Vogt, BD, Kang, S, Rao, A, Lin, EK, Satija, SK & Turnquest, K 2007, Direct measurement of the in situ developed latent image: The residual swelling fraction. in Advances in Resist Materials and Processing Technology XXIV. PART 1 edn, 651910, Proceedings of SPIE - The International Society for Optical Engineering, no. PART 1, vol. 6519, Advances in Resist Materials and Processing Technology XXIV, San Jose, CA, United States, 2/26/07. https://doi.org/10.1117/12.712311

Direct measurement of the in situ developed latent image: The residual swelling fraction. / Prabhu, Vivek M.; Vogt, Bryan D.; Kang, Shuhui et al.
Advances in Resist Materials and Processing Technology XXIV. PART 1. ed. 2007. 651910 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6519, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Direct measurement of the in situ developed latent image

T2 - Advances in Resist Materials and Processing Technology XXIV

AU - Prabhu, Vivek M.

AU - Vogt, Bryan D.

AU - Kang, Shuhui

AU - Rao, Ashwin

AU - Lin, Eric K.

AU - Satija, Sushil K.

AU - Turnquest, Karen

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N2 - The spatial distribution of polymer photoresist and deuterium labeled developer highlights a fraction of material at a model line edge that swells, but does not dissolve. This residual swelling fraction remains swollen during both the in situ development and rinse steps uncovering that the final lithographic feature is resolved by a collapse mechanism during the drying step. We demonstrate that contrast variant neutron reflectivity provides a general method to probe the nanometer resolved in situ development and rinse process step.

AB - The spatial distribution of polymer photoresist and deuterium labeled developer highlights a fraction of material at a model line edge that swells, but does not dissolve. This residual swelling fraction remains swollen during both the in situ development and rinse steps uncovering that the final lithographic feature is resolved by a collapse mechanism during the drying step. We demonstrate that contrast variant neutron reflectivity provides a general method to probe the nanometer resolved in situ development and rinse process step.

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SN - 9780819466389

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Advances in Resist Materials and Processing Technology XXIV

Y2 - 26 February 2007 through 28 February 2007

ER -

Direct measurement of the in situ developed latent image: The residual swelling fraction

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All Science Journal Classification (ASJC) codes

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