Direct sub-100-nm patterning of an organic low-k dielectric for electrical and optical interconnects

Keyphrases

• Optical Interconnects 100%
• Sub-100 Nm 100%
• Low Dielectric Constant Materials 100%
• Electrical Interconnect 100%
• Low-k Dielectric 100%
• Technology Node 50%
• Fabrication Methods 50%
• Electron Beam Lithography 50%
• Copper Interconnect 50%

Engineering

• Optical Interconnect 100%
• Electrical Interconnects 100%

Material Science

• Dielectric Material 100%
• Electronic Circuit 33%
• Lithography 33%