Direct write of resistive lines on SiC

The effects of the fluence and irradiance on the ability to write controlled resistance, conductive tracks using nanosecond laser pulses were studied. Two spot sizes and a large range of fluences were used to determine the optimal parameters to achieve controlled resistance. The resistance of the lines was determined using a digital ohmmeter. Optical micrographs were used to obtain the linewidths of the laser-written tracks, while profilometer scans and SEM were used to determine the ablation depths.