TY - GEN
T1 - Displacement and blocking force modeling for piezoelectric uniflex Microactuators
AU - Kommepalli, Hareesh K.R.
AU - Rahn, Christopher D.
AU - Yu, Han G.
AU - Trolier-Mckinstry, Susan
AU - Tadigadapa, Srinivas A.
AU - Muhlstein, Christopher L.
PY - 2009
Y1 - 2009
N2 - Microactuators provide controlled motion and force for applications ranging from RF switches to rate gyros. Large amplitude response in piezoelectric actuators requires amplification of their small strain. This paper studies a uniflex microactuator that combines the strain amplification mechanisms of a unimorph and flexural motion to produce large displacement and blocking force. An analytical model is developed with three connected beams and a reflective symmetric boundary condition that predicts actuator displacement and blocking force as a function of the applied voltage. The model shows that the uniflex design requires appropriate parameter ranges, especially the clearance between the unimorph and aluminum cap, to ensure that both the unimorph and flexural amplification effects are realized. With a weakened joint at the unimorph/cap interface, the model accurately predicts the displacement and blocking force of four actuators.
AB - Microactuators provide controlled motion and force for applications ranging from RF switches to rate gyros. Large amplitude response in piezoelectric actuators requires amplification of their small strain. This paper studies a uniflex microactuator that combines the strain amplification mechanisms of a unimorph and flexural motion to produce large displacement and blocking force. An analytical model is developed with three connected beams and a reflective symmetric boundary condition that predicts actuator displacement and blocking force as a function of the applied voltage. The model shows that the uniflex design requires appropriate parameter ranges, especially the clearance between the unimorph and aluminum cap, to ensure that both the unimorph and flexural amplification effects are realized. With a weakened joint at the unimorph/cap interface, the model accurately predicts the displacement and blocking force of four actuators.
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M3 - Conference contribution
AN - SCOPUS:69949145971
SN - 9780791843253
SN - 9780791843284
T3 - 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
SP - 547
EP - 552
BT - 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
T2 - 2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Y2 - 3 August 2008 through 6 August 2008
ER -