TY - JOUR
T1 - D+, He+ and H+ sputtering of solid and liquid phase tin
AU - Coventry, M. D.
AU - Allain, J. P.
AU - Ruzic, D. N.
N1 - Funding Information:
The authors would like to acknowledge helpful discussions with J.N. Brooks and R. Bastasz. Acknowledgement is also made to the DOE/ALPS program for financial support of this work through contract DOE DEFG 0299ER54515.
Copyright:
Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.
PY - 2003/3
Y1 - 2003/3
N2 - Absolute sputtering yields of Sn in the solid and liquid phases for incident H+, D+, and He+ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45° to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation.
AB - Absolute sputtering yields of Sn in the solid and liquid phases for incident H+, D+, and He+ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45° to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation.
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U2 - 10.1016/S0022-3115(02)01369-7
DO - 10.1016/S0022-3115(02)01369-7
M3 - Conference article
AN - SCOPUS:17144450206
SN - 0022-3115
VL - 313-316
SP - 636
EP - 640
JO - Journal of Nuclear Materials
JF - Journal of Nuclear Materials
IS - SUPPL.
T2 - Plasma - Surface Interactions in Controlled Fusion Devices
Y2 - 26 May 2002 through 31 May 2002
ER -