Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

Antonios Armaou; Amit Varshney

doi:10.23919/acc.2004.1383618

Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

Antonios Armaou, Amit Varshney

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

Original language	English (US)
Pages (from-to)	279-286
Number of pages	8
Journal	Proceedings of the American Control Conference
Volume	1
DOIs	https://doi.org/10.23919/acc.2004.1383618
State	Published - 2004
Event	Proceedings of the 2004 American Control Conference (AAC) - Boston, MA, United States Duration: Jun 30 2004 → Jul 2 2004

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.23919/acc.2004.1383618

Cite this

@article{d800ff96cf9f4b0e92936bb02ddd6d7f,

title = "Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy",

abstract = "We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.",

author = "Antonios Armaou and Amit Varshney",

year = "2004",

doi = "10.23919/acc.2004.1383618",

language = "English (US)",

volume = "1",

pages = "279--286",

journal = "Proceedings of the American Control Conference",

issn = "0743-1619",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Dynamic optimization of dissipative PDEs using control vector parameterization

T2 - Proceedings of the 2004 American Control Conference (AAC)

AU - Armaou, Antonios

AU - Varshney, Amit

PY - 2004

Y1 - 2004

N2 - We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

AB - We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=8744241221&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8744241221&partnerID=8YFLogxK

U2 - 10.23919/acc.2004.1383618

DO - 10.23919/acc.2004.1383618

M3 - Conference article

AN - SCOPUS:8744241221

SN - 0743-1619

VL - 1

SP - 279

EP - 286

JO - Proceedings of the American Control Conference

JF - Proceedings of the American Control Conference

Y2 - 30 June 2004 through 2 July 2004

ER -

Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this