Abstract
We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 279-286 |
| Number of pages | 8 |
| Journal | Proceedings of the American Control Conference |
| Volume | 1 |
| DOIs | |
| State | Published - 2004 |
| Event | Proceedings of the 2004 American Control Conference (AAC) - Boston, MA, United States Duration: Jun 30 2004 → Jul 2 2004 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
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