TY - GEN
T1 - Dynamic response of a piezoelectric flextensional microactuator
AU - Cheong, Jongpil
AU - Tadigadapa, Srinivas
AU - Rahn, Christopher D.
PY - 2005
Y1 - 2005
N2 - Microactuators capable of providing high resolution displacement and controlled force have many applications in RF MEMS, microfluidics, and motion control. This paper theoretically and experimentally investigates the dynamic response of a piezoelectric flextensional microactuator consisting of a clamped beam that buckles in response to contraction of a bonded PZT support. The DRIE and solder bonding fabrication process produces beams with initial curvature that affects their dynamic response. Unlike previous research where sinusoidal initial beam shapes are analyzed, polynomial initial beam shape enables more accurate prediction of beam natural frequencies and frequency response when compared with experimental results. The inclusion of squeeze film damping between the beam and PZT support enables the model to predict frequency response. Experiments show that mounting the PZT with soft carbon tape limits PZT vibration.
AB - Microactuators capable of providing high resolution displacement and controlled force have many applications in RF MEMS, microfluidics, and motion control. This paper theoretically and experimentally investigates the dynamic response of a piezoelectric flextensional microactuator consisting of a clamped beam that buckles in response to contraction of a bonded PZT support. The DRIE and solder bonding fabrication process produces beams with initial curvature that affects their dynamic response. Unlike previous research where sinusoidal initial beam shapes are analyzed, polynomial initial beam shape enables more accurate prediction of beam natural frequencies and frequency response when compared with experimental results. The inclusion of squeeze film damping between the beam and PZT support enables the model to predict frequency response. Experiments show that mounting the PZT with soft carbon tape limits PZT vibration.
UR - http://www.scopus.com/inward/record.url?scp=33144455982&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33144455982&partnerID=8YFLogxK
U2 - 10.1115/detc2005-84701
DO - 10.1115/detc2005-84701
M3 - Conference contribution
AN - SCOPUS:33144455982
SN - 0791847381
SN - 9780791847381
T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005
SP - 2037
EP - 2042
BT - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005
PB - American Society of Mechanical Engineers
T2 - DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Y2 - 24 September 2005 through 28 September 2005
ER -