Dynamic simulation of optical MEM switches

T. P. Kurzweg; J. A. Martinez; S. P. Levitan; P. J. Marchand; D. M. Chiarulli

doi:10.1117/12.425349

Dynamic simulation of optical MEM switches

T. P. Kurzweg, J. A. Martinez, S. P. Levitan, P. J. Marchand, D. M. Chiarulli

School of Engineering (Behrend)

Research output: Contribution to journal › Conference article › peer-review

Abstract

Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.

Original language	English (US)
Pages (from-to)	104-115
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4408
DOIs	https://doi.org/10.1117/12.425349
State	Published - 2001
Event	Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France Duration: Apr 25 2001 → Apr 27 2001

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.425349

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title = "Dynamic simulation of optical MEM switches",

abstract = "Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.",

author = "Kurzweg, {T. P.} and Martinez, {J. A.} and Levitan, {S. P.} and Marchand, {P. J.} and Chiarulli, {D. M.}",

year = "2001",

doi = "10.1117/12.425349",

language = "English (US)",

volume = "4408",

pages = "104--115",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 ; Conference date: 25-04-2001 Through 27-04-2001",

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T1 - Dynamic simulation of optical MEM switches

AU - Kurzweg, T. P.

AU - Martinez, J. A.

AU - Levitan, S. P.

AU - Marchand, P. J.

AU - Chiarulli, D. M.

PY - 2001

Y1 - 2001

N2 - Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.

AB - Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.

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VL - 4408

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EP - 115

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Y2 - 25 April 2001 through 27 April 2001

ER -

Dynamic simulation of optical MEM switches

Abstract

All Science Journal Classification (ASJC) codes

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