Dynamic simulation of optical MEM switches

T. P. Kurzweg, J. A. Martinez, S. P. Levitan, P. J. Marchand, D. M. Chiarulli

Research output: Contribution to journalConference articlepeer-review


Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.

Original languageEnglish (US)
Pages (from-to)104-115
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2001
EventDesign, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France
Duration: Apr 25 2001Apr 27 2001

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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