TY - GEN
T1 - Dynamics of microscale thin film AlN piezoelectric resonators enables low phase noise UHF frequency sources
AU - Piazza, Gianluca
AU - Tazzoli, Augusto
AU - Miller, Nicholas
AU - Segovia, Jeronimo
AU - Cassella, Cristian
AU - Koo, Jabeom
AU - Otis, Brian
AU - McNaul, Kamala
AU - Gibson, Brian
AU - Turner, Kimberly
AU - Palmer, Todd
PY - 2013
Y1 - 2013
N2 - Miniaturized, multi-band and high frequency oscillators that are compatible with CMOS processes are highly desirable for the synthesis of compact, stable, and low power frequency sources for reconfigurable radio frequency communication systems and cognitive radios. Aluminum nitride (AlN) contour mode MEMS resonators (CMR) are emerging devices capable of high Q, low impedance, and multi-frequency operation on a single chip. The frequency stability of these AlN MEMS devices is of primary importance in delivering oscillators that exhibit low phase noise, and low sensitivity to temperature and acceleration. In this article we describe how the resonator dynamics impacts oscillator performance and present some preliminary demonstrations of ultra-high-frequency (UHF) oscillators. An example of an oscillator prototype we synthesized with a 586 MHz AlN CMR exhibited phase noise < - 91 dBc/Hz and - 160 dBc/Hz at 1 kHz and 10 MHz offsets, temperature stability of 2 ppm from - 20 to + 85 C, and acceleration sensitivity < 30 ppb/G.
AB - Miniaturized, multi-band and high frequency oscillators that are compatible with CMOS processes are highly desirable for the synthesis of compact, stable, and low power frequency sources for reconfigurable radio frequency communication systems and cognitive radios. Aluminum nitride (AlN) contour mode MEMS resonators (CMR) are emerging devices capable of high Q, low impedance, and multi-frequency operation on a single chip. The frequency stability of these AlN MEMS devices is of primary importance in delivering oscillators that exhibit low phase noise, and low sensitivity to temperature and acceleration. In this article we describe how the resonator dynamics impacts oscillator performance and present some preliminary demonstrations of ultra-high-frequency (UHF) oscillators. An example of an oscillator prototype we synthesized with a 586 MHz AlN CMR exhibited phase noise < - 91 dBc/Hz and - 160 dBc/Hz at 1 kHz and 10 MHz offsets, temperature stability of 2 ppm from - 20 to + 85 C, and acceleration sensitivity < 30 ppb/G.
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U2 - 10.1109/EFTF-IFC.2013.6702291
DO - 10.1109/EFTF-IFC.2013.6702291
M3 - Conference contribution
AN - SCOPUS:84893223375
SN - 9781479903429
T3 - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
SP - 555
EP - 558
BT - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
T2 - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Y2 - 21 July 2013 through 25 July 2013
ER -