Abstract
The generation of electrically neutral E′ centers was studied. It was found that the generation of these centers is accompanied by a large monotonic increase in leakage currents and that the disappearance of these centers is accompanied by a monotonic decrease in leakage currents. Overall, the results indicate an important role for E′ centers in stress induced leakage currents.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2169-2173 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena |
| Volume | 18 |
| Issue number | 4 |
| DOIs | |
| State | Published - Jul 2000 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering
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