ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing: Preface

Jerzy Ruzyllo; Takeshi Hattori; Richard E. Novak; Paul Mertens; Pascal Besson

ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing: Preface

Jerzy Ruzyllo, Takeshi Hattori, Richard E. Novak, Paul Mertens, Pascal Besson

Materials Research Institute (MRI)

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii
Journal	ECS Transactions
Volume	11
Issue number	2
State	Published - 2007
Event	10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting - Washington, DC, United States Duration: Oct 7 2007 → Oct 12 2007

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing: Preface",

author = "Jerzy Ruzyllo and Takeshi Hattori and Novak, {Richard E.} and Paul Mertens and Pascal Besson",

year = "2007",

language = "English (US)",

volume = "11",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "2",

note = "10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting ; Conference date: 07-10-2007 Through 12-10-2007",

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TY - JOUR

T1 - ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing

T2 - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting

AU - Ruzyllo, Jerzy

AU - Hattori, Takeshi

AU - Novak, Richard E.

AU - Mertens, Paul

AU - Besson, Pascal

PY - 2007

Y1 - 2007

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UR - http://www.scopus.com/inward/citedby.url?scp=45249092984&partnerID=8YFLogxK

M3 - Editorial

AN - SCOPUS:45249092984

SN - 1938-5862

VL - 11

SP - iii

JO - ECS Transactions

JF - ECS Transactions

IS - 2

Y2 - 7 October 2007 through 12 October 2007

ER -

ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing: Preface

All Science Journal Classification (ASJC) codes

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Cite this