ECS Transactions: Preface

Takeshi Hattori; Jerzy Ruzyllo; Paul Mertens; Richard E. Novak

ECS Transactions: Preface

Takeshi Hattori
, Jerzy Ruzyllo
, Paul Mertens
, Richard E. Novak

Materials Research Institute (MRI)

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Journal	ECS Transactions
Volume	41
Issue number	5
State	Published - Dec 1 2011
Event	12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting - Boston, MA, United States Duration: Oct 10 2011 → Oct 11 2011

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "ECS Transactions: Preface",

author = "Takeshi Hattori and Jerzy Ruzyllo and Paul Mertens and Novak, \{Richard E.\}",

year = "2011",

month = dec,

day = "1",

language = "English (US)",

volume = "41",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "5",

note = "12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting ; Conference date: 10-10-2011 Through 11-10-2011",

}

TY - JOUR

T1 - ECS Transactions

T2 - 12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting

AU - Hattori, Takeshi

AU - Ruzyllo, Jerzy

AU - Mertens, Paul

AU - Novak, Richard E.

PY - 2011/12/1

Y1 - 2011/12/1

UR - https://www.scopus.com/pages/publications/84857271376

UR - https://www.scopus.com/pages/publications/84857271376#tab=citedBy

M3 - Editorial

AN - SCOPUS:84857271376

SN - 1938-5862

VL - 41

JO - ECS Transactions

JF - ECS Transactions

IS - 5

Y2 - 10 October 2011 through 11 October 2011

ER -

ECS Transactions: Preface

All Science Journal Classification (ASJC) codes

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Cite this