ECS Transactions: Preface

Takeshi Hattori; Jerzy Ruzyllo; Richard E. Novak; Paul Mertens; Pascal Besson

ECS Transactions: Preface

Takeshi Hattori
, Jerzy Ruzyllo
, Richard E. Novak
, Paul Mertens
, Pascal Besson

Materials Research Institute (MRI)

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii-iv
Journal	ECS Transactions
Volume	25
Issue number	5
State	Published - 2009
Event	11th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 216th ECS Meeting - Vienna, Austria Duration: Oct 4 2009 → Oct 9 2009

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "ECS Transactions: Preface",

author = "Takeshi Hattori and Jerzy Ruzyllo and Novak, \{Richard E.\} and Paul Mertens and Pascal Besson",

year = "2009",

language = "English (US)",

volume = "25",

pages = "iii--iv",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Institute of Physics",

number = "5",

note = "11th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 216th ECS Meeting ; Conference date: 04-10-2009 Through 09-10-2009",

}

TY - JOUR

T1 - ECS Transactions

T2 - 11th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 216th ECS Meeting

AU - Hattori, Takeshi

AU - Ruzyllo, Jerzy

AU - Novak, Richard E.

AU - Mertens, Paul

AU - Besson, Pascal

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/74949131074

UR - https://www.scopus.com/pages/publications/74949131074#tab=citedBy

M3 - Editorial

AN - SCOPUS:74949131074

SN - 1938-5862

VL - 25

SP - iii-iv

JO - ECS Transactions

JF - ECS Transactions

IS - 5

Y2 - 4 October 2009 through 9 October 2009

ER -

ECS Transactions: Preface

All Science Journal Classification (ASJC) codes

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Cite this