Keyphrases
GaN Layers
100%
Growth Stress
100%
Tensile Stress
40%
Metal-organic Chemical Vapor Deposition (MOCVD)
20%
In-situ Monitoring
20%
Transmission Electron Microscopy
20%
Si Substrate
20%
High Temperature
20%
Undoped
20%
Compressive Stress
20%
Structural Evolution
20%
Pseudosubstrate
20%
Interlayer Transition
20%
Dislocation Density
20%
Stress Evolution
20%
GaN Epitaxial Layers
20%
Material Science
Aluminum Nitride
100%
Ultimate Tensile Strength
40%
Density
20%
Metal-Organic Chemical Vapor Deposition
20%
Transmission Electron Microscopy
20%
Epitaxial Layer
20%
Engineering
Interlayer
100%
Tensile Stress σ
33%
Transmissions
16%
Metal Organic Chemical Vapor Deposition
16%
Si Substrate
16%
Compressive Stress
16%
Epitaxial Layer
16%
Earth and Planetary Sciences
Metalorganic Chemical Vapor Deposition
16%