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Effect of annealing on the band alignment of ALD SiO2 on (AlxGa1-x)2O3 for x = 0.2 - 0.65

  • Chaker Fares
  • , Zahabul Islam
  • , Aman Haque
  • , Max Kneiß
  • , Holger Von Wenckstern
  • , Marius Grundmann
  • , Marko Tadjer
  • , Fan Ren
  • , S. J. Pearton

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