Effect of boron concentration on local structure and spontaneous polarization in AlBN thin films

S. Calderon V, John Hayden, M. Delower, Jon Paul Maria, Elizabeth C. Dickey

Research output: Contribution to journalArticlepeer-review

Abstract

The discovery of ferroelectricity in polar wurtzite-based ternary materials, such as Al1−xBxN, has attracted attention due to their compatibility with complementary metal-oxide-semiconductor processes and potential use in integrated non-volatile memory devices. However, the origin of ferroelectricity and the fundamental control of the polarization switching in these materials are still under intensive investigation but appear to be related to local disorder induced from the alloying. In this work, we report the effect of boron alloying on the local structure of Al1−xBxN films deposited by magnetron sputtering. Our results reveal a diminished crystalline order as a function of boron concentration, accompanied by a reduction in the spontaneous polarization. The film disorder is primarily associated with the dissimilar bond lengths between Al-N and B-N and the formation of threading dislocations induced by B incorporation in the structure.

Original languageEnglish (US)
Article number021105
JournalAPL Materials
Volume12
Issue number2
DOIs
StatePublished - Feb 1 2024

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • General Engineering

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