Effect of charged-particle bombardment on collector mirror reflectivity in EUV lithography devices

J. P. Allain, M. Nieto, A. Hassanein, V. Titov, P. Plotkin, M. Hendricks, E. Hinson, C. Chrobak, M. H.L. Van Der Velden, B. Rice

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Scopus citations

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