Effect of ion-beam sputter damage on Schottky barrier formation in silicon

Keyphrases

• Ion Beam 100%
• Schottky Barrier 100%
• Barrier Formation 100%
• Ion Effect 100%
• Sputter Damage 100%
• Molybdenum 50%
• Single Crystal 50%
• Ohmic Contact 50%
• Surface Damage 50%
• Surface Layer 50%
• Band Edge 50%
• P-type Si 50%
• Ion Beam Sputtering 50%
• Ohmic Behavior 50%
• Rectifying Behavior 50%
• Conductivity Type 50%
• Schottky Barrier Diode 50%

Material Science

• Silicon 100%
• Schottky Barrier 100%
• Molybdenum 50%
• Single Crystal 50%
• Sputter Deposition 50%
• Surface Damage 50%

Engineering

• Beam Surface 100%