Effect of low energy Ar+ ion implantation on silicon surface barriers

S. Ashok, H. Kräutle, H. Beneking, A. Mogro-Campero

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of low energy Ar+ ion implantation on silicon surface barriers'. Together they form a unique fingerprint.

Material Science

Keyphrases

Engineering