Effect of neutral ion beam sputtering and etching on silicon

Engineering & Materials Science

• Ion beams 89%
• Sputtering 80%
• Etching 67%
• Semiconductor diodes 52%
• Silicon 49%
• Metals 40%
• Semiconductor materials 27%

Physics & Astronomy

• neutral beams 71%
• sputtering 49%
• ion beams 48%
• etching 47%
• semiconductor diodes 39%
• silicon 33%
• metals 32%
• damage 22%
• causes 19%

Chemical Compounds

• Ion Beam Sputtering 100%
• Ion Beam 69%
• Etching 56%
• Semiconductor 23%
• Flow 20%
• Surface 10%