Effect of preheating temperature on the deposition rate of TiCN

Zhi Jie Liu; Peter Leicht; Yi Xiong Liu; Zi Kui Liu

doi:10.1016/j.surfcoat.2006.05.034

Effect of preheating temperature on the deposition rate of TiCN

Zhi Jie Liu, Peter Leicht, Yi Xiong Liu, Zi Kui Liu

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8 Scopus citations

Abstract

The vaporizing process of the liquid precursors TiCl₄ and CH₃CN for the TiCN deposition was investigated theoretically and experimentally. Dependence of the TiCN deposition rate on preheating temperature of TiCl₄ and CH₃CN was observed. It was found that the TiCN deposition rate with the preheating temperature of 110 °C is less than half of the deposition rate at 50 °C. Through thermodynamic calculations, it was discovered that the TiCl₄ and CH₃CN vapor phases were not fully generated if the preheating temperature is too low. If the preheating temperature is too high, gas phase reactions may cause loss of Ti resulting in lower TiCN deposition rates.

Original language	English (US)
Pages (from-to)	2818-2821
Number of pages	4
Journal	Surface and Coatings Technology
Volume	201
Issue number	6
DOIs	https://doi.org/10.1016/j.surfcoat.2006.05.034
State	Published - Dec 4 2006

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2006.05.034

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title = "Effect of preheating temperature on the deposition rate of TiCN",

abstract = "The vaporizing process of the liquid precursors TiCl4 and CH3CN for the TiCN deposition was investigated theoretically and experimentally. Dependence of the TiCN deposition rate on preheating temperature of TiCl4 and CH3CN was observed. It was found that the TiCN deposition rate with the preheating temperature of 110 °C is less than half of the deposition rate at 50 °C. Through thermodynamic calculations, it was discovered that the TiCl4 and CH3CN vapor phases were not fully generated if the preheating temperature is too low. If the preheating temperature is too high, gas phase reactions may cause loss of Ti resulting in lower TiCN deposition rates.",

author = "Liu, {Zhi Jie} and Peter Leicht and Liu, {Yi Xiong} and Liu, {Zi Kui}",

note = "Funding Information: We gratefully acknowledge the support from the Kennametal Inc and partial financial support from the National Science Foundation through the CAREER Award No. DMR-9983532 and the grant DMR-0510180.",

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doi = "10.1016/j.surfcoat.2006.05.034",

language = "English (US)",

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journal = "Surface and Coatings Technology",

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T1 - Effect of preheating temperature on the deposition rate of TiCN

AU - Liu, Zhi Jie

AU - Leicht, Peter

AU - Liu, Yi Xiong

AU - Liu, Zi Kui

N1 - Funding Information: We gratefully acknowledge the support from the Kennametal Inc and partial financial support from the National Science Foundation through the CAREER Award No. DMR-9983532 and the grant DMR-0510180.

PY - 2006/12/4

Y1 - 2006/12/4

N2 - The vaporizing process of the liquid precursors TiCl4 and CH3CN for the TiCN deposition was investigated theoretically and experimentally. Dependence of the TiCN deposition rate on preheating temperature of TiCl4 and CH3CN was observed. It was found that the TiCN deposition rate with the preheating temperature of 110 °C is less than half of the deposition rate at 50 °C. Through thermodynamic calculations, it was discovered that the TiCl4 and CH3CN vapor phases were not fully generated if the preheating temperature is too low. If the preheating temperature is too high, gas phase reactions may cause loss of Ti resulting in lower TiCN deposition rates.

AB - The vaporizing process of the liquid precursors TiCl4 and CH3CN for the TiCN deposition was investigated theoretically and experimentally. Dependence of the TiCN deposition rate on preheating temperature of TiCl4 and CH3CN was observed. It was found that the TiCN deposition rate with the preheating temperature of 110 °C is less than half of the deposition rate at 50 °C. Through thermodynamic calculations, it was discovered that the TiCl4 and CH3CN vapor phases were not fully generated if the preheating temperature is too low. If the preheating temperature is too high, gas phase reactions may cause loss of Ti resulting in lower TiCN deposition rates.

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EP - 2821

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 6

ER -

Effect of preheating temperature on the deposition rate of TiCN

Abstract

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