Abstract
Ferroelectric PbZr0.52Ti0.48O3 (PZT) thin films were prepared by a sol-gel method using SrTiO3 (STO) buffer layers. The effect of SrTiO3 buffer layers on the crystallization and electrical properties of PZT thin films has been investigated. X-ray diffraction shows that the STO buffer layers have a significant effect on the crystallization, orientation and electrical properties of PZT thin films. PZT thin films are fully crystallized at 550°C with SrTiO3 buffer layers. The (111) preferential orientation becomes stronger first with increasing thickness of SrTiO3 buffer layer and then weakens after a critical thickness. The electrical properties, as well as the crystallization mechanism in association with SrTiO3 buffer layers are investigated and discussed.
Original language | English (US) |
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Pages (from-to) | 206-212 |
Number of pages | 7 |
Journal | Ferroelectrics |
Volume | 406 |
Issue number | 1 |
DOIs | |
State | Published - 2010 |
Event | 12th International Meeting on Ferroelectricity, IMF-12 and the 18th IEEE International Symposium on Applications of Ferroelectrics, ISAF-18 - Xi'an, China Duration: Aug 23 2009 → Aug 27 2009 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics