Effect of surface reactivity on the nucleation of hydrocarbon thin films through molecular-cluster beam deposition

The effect of surface reactivity on thin film nucleation through cluster-surface collisions is examined using molecular dynamics simulations with a well-known reactive empirical-bond order potential for hydrocarbons. It has previously been shown through experiments that strongly adhering polymer thin films can be generated through the impact of organic clusters with mica, diamond, or glass surfaces. In this study, molecular clusters of ethylene and acetylene are impacted at hyperthermal velocities of about 1.3 keV per cluster against activated bare 1×1 diamond (111), reconstructed 2×1 diamond (111), and hydrogen-terminated diamond (111) surfaces. As a result of the collisions, the cluster molecules react with each other and the surface nucleating thin hydrocarbon films. The effect of surface and molecular reactivity on thin film nucleation and structure is discussed.