TY - JOUR
T1 - Effect of the H2O/TEOS ratio upon the preparation and nitridation of silica sol/gel films
AU - Glaser, P. M.
AU - Pantano, C. G.
N1 - Funding Information:
The authors gratefully acknowledge the financial support of Sandia National Laboratories. The technical assistance of J.F. Kelso (AES measurements) and K.C. Feinberg is also appreciated.
PY - 1984/2
Y1 - 1984/2
N2 - Silica sol/gel thin films were deposited on silicon wafers by spinning solutions of varying H2O/TEOS ratio. It was found that the density of the initial microporous dried gel film increases with the H2O/TEOS ratio. Consequently, the amount of film shrinkage observed during thermal treatment in N2 or NH3 was decreased with increasing H2O/TEOS. This is contrary to the behavior of bulk gels derived from solutions of increasing H2O/TEOS ratio. Most significant, though, was the enhanced incorporation of nitrogen during ammonia treatment of the films prepared with solutions of increasing H2O/TEOS ratio. Moreover, there was some indication that the nitrided films obtained after the ammonia treatment may limit oxidation of the silicon wafer.
AB - Silica sol/gel thin films were deposited on silicon wafers by spinning solutions of varying H2O/TEOS ratio. It was found that the density of the initial microporous dried gel film increases with the H2O/TEOS ratio. Consequently, the amount of film shrinkage observed during thermal treatment in N2 or NH3 was decreased with increasing H2O/TEOS. This is contrary to the behavior of bulk gels derived from solutions of increasing H2O/TEOS ratio. Most significant, though, was the enhanced incorporation of nitrogen during ammonia treatment of the films prepared with solutions of increasing H2O/TEOS ratio. Moreover, there was some indication that the nitrided films obtained after the ammonia treatment may limit oxidation of the silicon wafer.
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U2 - 10.1016/0022-3093(84)90400-9
DO - 10.1016/0022-3093(84)90400-9
M3 - Article
AN - SCOPUS:0020703331
SN - 0022-3093
VL - 63
SP - 209
EP - 221
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 1-2
ER -