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Effect of UV-assisted RTA on the electrical properties of (Ba,Sr) TiO3 films for low temperature embedding of decoupling capacitor
Kwang Hwan Cho, Min Gyu Kang, Chong Yun Kang, Seok Jin Yoon, Youngpak Lee, Jong Hee Kim, Bong Hee Cho
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations