Effect of UV-assisted RTA on the electrical properties of (Ba,Sr) TiO3 films for low temperature embedding of decoupling capacitor

  • Kwang Hwan Cho
  • , Min Gyu Kang
  • , Chong Yun Kang
  • , Seok Jin Yoon
  • , Youngpak Lee
  • , Jong Hee Kim
  • , Bong Hee Cho

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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