Effects of deposition parameters on crystallization of PECVD amorphous silicon films

Yaozu Wang, Reece Kingi, Osama O. Awadelkarim, Stephen J. Fonash

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of deposition parameters on crystallization of PECVD amorphous silicon films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds