Keyphrases
Leakage Current
100%
Dielectric
100%
MEMS Reliability
100%
Electric Leakage
100%
MEMS Devices
50%
Electric Field (E-field)
25%
Electrical Breakdown
25%
Dielectric Properties
25%
Quasi-static
25%
Submicron
25%
Mechanical Design
25%
Corrosion
25%
Polysilicon
25%
Electrode Spacing
25%
Geometric Properties
25%
Performance Implications
25%
Dielectric Breakdown
25%
Silicon Electrode
25%
Balance Ability
25%
Electrode Geometry
25%
Anodic Oxidation
25%
Electrical Design
25%
Acceleration Factor
25%
Electrostatically Actuated
25%
Engineering
Dielectrics
100%
Microelectromechanical System
100%
Key Parameter
16%
Mechanical Design
16%
Electrode Geometry
16%
Silicon Electrode
16%
Material Science
Microelectromechanical System
100%
Silicon
20%
Oxidation Reaction
20%
Electrical Breakdown
20%
Dielectric Property
20%
Corrosion
20%