Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors

Vasu Pulijala; Azeemuddin Syed

doi:10.1109/NEMS.2019.8915596

Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors

Vasu Pulijala, Azeemuddin Syed

School of Engineering (Behrend)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper discusses the effects of heating on the performance of aluminum spiral inductors incorporated with 70 nm Permalloy domain patterns. Spiral inductors with domain patterned Permalloy are heated to temperatures 373 K, 473 K and 573 K respectively. After heating till each temperature the wafer is cooled down to measure inductance and series resistance of spiral inductors. It is observed that shape and size of the pattern influences the variation of permeability of Permalloy with heating.

Original language	English (US)
Title of host publication	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	72-75
Number of pages	4
ISBN (Electronic)	9781728116297
DOIs	https://doi.org/10.1109/NEMS.2019.8915596
State	Published - Apr 2019
Event	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 - Bangkok, Thailand Duration: Apr 11 2019 → Apr 14 2019

Publication series

Name	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

Conference

Conference	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Country/Territory	Thailand
City	Bangkok
Period	4/11/19 → 4/14/19

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Instrumentation

Access to Document

10.1109/NEMS.2019.8915596

Cite this

Pulijala, V., & Syed, A. (2019). Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 (pp. 72-75). Article 8915596 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2019.8915596

Pulijala, Vasu ; Syed, Azeemuddin. / Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors. Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 72-75 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

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title = "Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors",

abstract = "This paper discusses the effects of heating on the performance of aluminum spiral inductors incorporated with 70 nm Permalloy domain patterns. Spiral inductors with domain patterned Permalloy are heated to temperatures 373 K, 473 K and 573 K respectively. After heating till each temperature the wafer is cooled down to measure inductance and series resistance of spiral inductors. It is observed that shape and size of the pattern influences the variation of permeability of Permalloy with heating.",

author = "Vasu Pulijala and Azeemuddin Syed",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 ; Conference date: 11-04-2019 Through 14-04-2019",

year = "2019",

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doi = "10.1109/NEMS.2019.8915596",

language = "English (US)",

series = "Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Pulijala, V & Syed, A 2019, Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors. in Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019., 8915596, Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Institute of Electrical and Electronics Engineers Inc., pp. 72-75, 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, 4/11/19. https://doi.org/10.1109/NEMS.2019.8915596

Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors. / Pulijala, Vasu; Syed, Azeemuddin.
Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 72-75 8915596 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper discusses the effects of heating on the performance of aluminum spiral inductors incorporated with 70 nm Permalloy domain patterns. Spiral inductors with domain patterned Permalloy are heated to temperatures 373 K, 473 K and 573 K respectively. After heating till each temperature the wafer is cooled down to measure inductance and series resistance of spiral inductors. It is observed that shape and size of the pattern influences the variation of permeability of Permalloy with heating.

AB - This paper discusses the effects of heating on the performance of aluminum spiral inductors incorporated with 70 nm Permalloy domain patterns. Spiral inductors with domain patterned Permalloy are heated to temperatures 373 K, 473 K and 573 K respectively. After heating till each temperature the wafer is cooled down to measure inductance and series resistance of spiral inductors. It is observed that shape and size of the pattern influences the variation of permeability of Permalloy with heating.

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BT - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

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Pulijala V, Syed A. Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 72-75. 8915596. (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). doi: 10.1109/NEMS.2019.8915596

Effects of heating on the performance of 70 nm thick domain patterned permalloy incorporated rf spiral inductors

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