Effects of Preoxidation Ambient in Very Thin Thermal Oxide on Silicon

Keyphrases

• Thin Oxides 100%
• Pre-oxidation 100%
• Thermal Oxide 100%
• Dielectric Strength 100%
• Oxide Dielectrics 100%
• Oxides on Silicon 100%
• Water Vapor 50%
• Growth Process 50%
• Oxidation Rate 50%
• Silicon Wafer 50%
• Gas Atmosphere 50%
• Initial Growth Rate 50%
• High Dielectric Strength 50%
• Oxide Growth 50%

Material Science

• Silicon 100%
• Oxide Compound 100%
• Oxidation Reaction 60%
• Dielectric Material 60%
• Water Vapor 20%
• Silicon Wafer 20%

Engineering

• Dielectric Strength 100%
• Growth Process 33%
• Silicon Wafer 33%
• Oxidation Rate 33%
• Oxide Growth 33%