@inproceedings{30dc9c0119e84f4c91db480f4c2cb34d,
title = "Effects of radiation on newly synthesized allylamino-substituted polyphosphazenes",
abstract = "A collaborative effort to synthesize amino-substituted polyphosphazenes and characterize their sensitivity to radiation to determine the value of using such polymers as new and better resist materials for microlithographic applications is progressing. There is some evidence to support the theory that these polymers will exhibit the same RIE resistance as a phenoxy-substituted counterpart. The models of the earlier study led us to the realization that the addition of allylic substituents may enhance the radiation sensitivity of such polymers significantly. Such was the case for several of the polymers recently synthesized, characterized and irradiated.",
author = "Welker, {M. F.} and Allcock, {H. R.} and Grune, {G. L.} and Chern, {R. T.} and Stanett, {V. T.}",
year = "1992",
language = "English (US)",
isbn = "0841222169",
series = "Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering",
publisher = "Publ by ACS",
pages = "259--260",
booktitle = "Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering",
}