Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Hong Goo Yeo; Xiaokun Ma; Christopher Rahn; Susan Trolier-McKinstry

doi:10.1002/adfm.201601347

Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Hong Goo Yeo, Xiaokun Ma, Christopher Rahn, Susan Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

127 Scopus citations

Abstract

Extracting energy from low vibration frequencies (<10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a significantly higher efficiency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr,Ti)O₃ (PZT) films on Ni foil deposited by rf magnetron sputtering is shown to have high efficiency and large power for low frequency mechanical vibration. In particular, {001} textured PZT films are deposited on both sides of polished Ni foils with (100) oriented LaNiO₃ seed layers on HfO₂ buffer layers. The performance of PCM with an active area of 5.2 cm² is explored for various excitation accelerations (0.02–0.16 g [g = 9.8 m s⁻²]) around 6 Hz. The PCM device provides a power level of 3.9 mW cm⁻² g² and 65% mode shape efficiencies.

Original language	English (US)
Pages (from-to)	5940-5946
Number of pages	7
Journal	Advanced Functional Materials
Volume	26
Issue number	32
DOIs	https://doi.org/10.1002/adfm.201601347
State	Published - Aug 23 2016

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
General Chemistry
Condensed Matter Physics
General Materials Science
Electrochemistry
Biomaterials

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10.1002/adfm.201601347

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abstract = "Extracting energy from low vibration frequencies (<10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a significantly higher efficiency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr,Ti)O3 (PZT) films on Ni foil deposited by rf magnetron sputtering is shown to have high efficiency and large power for low frequency mechanical vibration. In particular, \{001\} textured PZT films are deposited on both sides of polished Ni foils with (100) oriented LaNiO3 seed layers on HfO2 buffer layers. The performance of PCM with an active area of 5.2 cm2 is explored for various excitation accelerations (0.02–0.16 g [g = 9.8 m s−2]) around 6 Hz. The PCM device provides a power level of 3.9 mW cm−2 g2 and 65\% mode shape efficiencies.",

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AU - Trolier-McKinstry, Susan

PY - 2016/8/23

Y1 - 2016/8/23

N2 - Extracting energy from low vibration frequencies (<10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a significantly higher efficiency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr,Ti)O3 (PZT) films on Ni foil deposited by rf magnetron sputtering is shown to have high efficiency and large power for low frequency mechanical vibration. In particular, {001} textured PZT films are deposited on both sides of polished Ni foils with (100) oriented LaNiO3 seed layers on HfO2 buffer layers. The performance of PCM with an active area of 5.2 cm2 is explored for various excitation accelerations (0.02–0.16 g [g = 9.8 m s−2]) around 6 Hz. The PCM device provides a power level of 3.9 mW cm−2 g2 and 65% mode shape efficiencies.

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Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

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