@inproceedings{8880196d5610442ebba196434249e3c1,
title = "Electrical characterization of As-Processed semiconductor surfaces",
abstract = "The paper is concerned with electrical characterization of as-processed semiconductor surfaces and near-surface regions for the purpose of process development and monitoring. The methods of electrical characterization based on Surface Photovoltage (SPV) and Photoconductance Decay (PCD) effects are discussed as being particularly conducive with the needs of as-processed semiconductor surface characterization and experimental results demonstrating merits of the proposed methodology are presented.",
author = "Jerzy Ruzyllo and Drummond, {Patrick J.}",
year = "2016",
month = jan,
day = "1",
doi = "10.4028/www.scientific.net/SSP.255.299",
language = "English (US)",
isbn = "9783035710847",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "299--303",
editor = "Mertens, {Paul W.} and Marc Meuris and Marc Meuris and Marc Heyns",
booktitle = "Ultra Clean Processing of Semiconductor Surfaces XIII",
note = "13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces , UCPSS 2016 ; Conference date: 12-09-2016 Through 14-09-2016",
}