Electrical studies on metal/SrTa₂O₆ or TiO ₂/ Si substrate stack systems

Material Science

• Dielectric Material 100%
• Titanium Oxide 100%
• Density 66%
• Capacitor 66%
• Capacitance 66%
• Silicon 33%
• Oxide Compound 33%
• Metal Oxide 33%
• Titanium Dioxide 33%
• Nitriding 33%

Keyphrases

• Stack System 100%
• SrTa2O6 100%
• Bulk Si 50%
• High-k Material 50%
• Leakage Current Density 50%
• Metal-insulator 50%
• High-k Gate Dielectrics 50%

Engineering

• Si Substrate 100%
• Dielectrics 50%
• Silicon Substrate 50%
• Interface State 50%
• Si Surface 50%
• Dielectric Layer 50%
• Oxide Thickness 50%
• Gate Dielectric 50%