@inproceedings{8ae986474d0041f884524ca125d599ae,
title = "Electrical studies on Parylene-C columnar microfibrous thin films",
abstract = "Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.",
author = "Khawaji, {Ibrahim H.} and Chandraprakash Chindam and Wasim Orfali and Awadelkarim, {Osama O.} and Akhlesh Lakhtakia",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting ; Conference date: 11-10-2015 Through 15-10-2015",
year = "2015",
doi = "10.1149/06905.0113ecst",
language = "English (US)",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "113--119",
editor = "S. Kar and K. Kita and D. Landheer and D. Misra",
booktitle = "Semiconductors, Dielectrics, and Metals for Nanoelectronics 13",
edition = "5",
}