Electroactive polymer-based MEMS for aerospace and medical applications

Tian Bing Xu, Ji Su, Qiming Zhang

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


Electroactive polymers (EAP) demonstrate advantages over some traditional electroactive materials such as electroceramics and magneostrictive materials for electromechanical device applications due to their high strain, light weight, flexibility, and low cost. Electroactive polymer-based microelectromechanical systems (EAP-MEMS) are increasingly demanded in many aerospace and medical applications. This paper will briefly review recent progress in the developments and applications of EAP- MEMS. In the past few years, several new configurations of micromachined actuators/transducers have been developed using electroactive polymers. The performance of these micromachined EAP-based devices has been evaluated for both fluid and air conditions. The performance of EAP-MEMS has also been theoretically modeled based on material properties and device configurations. In general, the results obtained from modeling agree with the experimental measurements. Critical process issues, including patterned micro-scale electrodes, molded micro/nano electroactive polymer structures, polymer to electrode adhesion and the development of conductive polymers for electrodes will be discussed. The challenges to develop complete polymer MEMS will also be addressed.

Original languageEnglish (US)
Pages (from-to)66-77
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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