@inproceedings{49b89ab5ef5e4d0385de7bd08254dedf,
title = "Electromechanically active flat optical devices",
abstract = "We demonstrate an electromechanically controllable reflective flat lens at mid-infrared wavelength. The lens is designed from plasmonic nano-discs, and focuses light at mid-infrared, 45° to the incoming beam. The flat lens is fabricated on a 2.8 µm thin membrane and integrated with a micro-electro-mechanical (MEMS) device. Mechanical testing of the MEMS device before and after integration of the flat lens confirms that the performance of the MEMS has not been compromised due to addition of a flat lens.",
author = "Tapashree Roy and Shuyan Zhang and Jung, {Il Woong} and Federico Capasso and Daniel Lopez",
note = "Funding Information: Use of the facilities at the Center for Nanoscale Materials, Argonne National Laboratory was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under contract number DE-AC02-06CH11357. Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",
year = "2016",
doi = "10.31438/trf.hh2016.64",
language = "English (US)",
series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
publisher = "Transducer Research Foundation",
pages = "238--241",
editor = "Allen, {Mark G.} and Tina Lamers",
booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
}