TY - JOUR
T1 - Electron beam damage in Auger electron spectroscopy
AU - Pantano, C. G.
AU - Madey, Theodore E.
N1 - Funding Information:
The authors acknowledgew ith pleasurea critical reading of the manuscript by Dr. C.J. Powell. The work was supportedi n part by the office of Naval Research (T.E.M.) and the Air Force Avionics Laboratory (C.G.P.)
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 1981
Y1 - 1981
N2 - The damaging effects of electronic excitation, charging and beam heating during Auger electron spectroscopy (AES) are treated. The origin, manifestation and practical consequences of the phenomena are reviewed. A damage threshold, or critical dose, for beam damage due to electronic excitation is derived and related to experimental parameters. The close correlation between the predicted thresholds and the critical doses for damage observed in typical AES analyses indicates that primary excitation processes dominate the beam damage mechanism. Charging and the electromigration of ions in glasses are also discussed in detail. It is suggested that AES analyses of materials with potential susceptibility to beam damage be executed and interpreted with caution.
AB - The damaging effects of electronic excitation, charging and beam heating during Auger electron spectroscopy (AES) are treated. The origin, manifestation and practical consequences of the phenomena are reviewed. A damage threshold, or critical dose, for beam damage due to electronic excitation is derived and related to experimental parameters. The close correlation between the predicted thresholds and the critical doses for damage observed in typical AES analyses indicates that primary excitation processes dominate the beam damage mechanism. Charging and the electromigration of ions in glasses are also discussed in detail. It is suggested that AES analyses of materials with potential susceptibility to beam damage be executed and interpreted with caution.
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U2 - 10.1016/0378-5963(81)90065-9
DO - 10.1016/0378-5963(81)90065-9
M3 - Article
AN - SCOPUS:0018812265
SN - 0378-5963
VL - 7
SP - 115
EP - 141
JO - Applications of Surface Science
JF - Applications of Surface Science
IS - 1-2
ER -